Master data| INID | Criterion | Field | Content |
|---|
| Type of IP right | SART | Patent |
| Status | ST | Pending/in force |
| 21 | DE file number | DAKZ | 10 2019 117 636.0 |
| 54 | Designation/title | TI | Dichtungsanordnung für eine teilweise im Vakuum angeordnete Interferometerstrecke |
| 51 | IPC main class | ICM (ICMV) | G01B 9/02 (2022.01) |
| 51 | IPC secondary class(es) | ICS (ICSV) | G12B 9/04 (2006.01) |
| 22 | DE application date | DAT | Jul 1, 2019 |
| 43 | Date of first publication | OT | Jul 23, 2020 |
| Date of publication of grant | PET | Jul 23, 2020 |
| 71/73 | Applicant/owner | INH | IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), 98693 Ilmenau, DE; Physikalisch - Technische Bundesanstalt, 38116 Braunschweig, DE |
| 72 | Inventor | IN | Hesse, Steffen, 98693 Ilmenau, DE; Katzschmann, Michael, 98693 Ilmenau, DE; Mohr, Hans-Ulrich, 98701 Großbreitenbach, DE; Schäffel, Christoph, Dr., 98693 Ilmenau, DE; Flügge, Jens, 38116 Braunschweig, DE |
| 74 | Representative | VTR | PATENTSCHUTZengel, 98527 Suhl, DE |
| 10 | Published DE documents | DEPN | Original document:
DE102019117636B3 Searchable text:
DE102019117636B3 |
| Address for service | | PATENTSCHUTZengel, 98527 Suhl, DE |
| Due date | FT FG | Jul 31, 2026 Annual fee for the 8th year
Patent fees |
| Patent division in charge | | 52 |
| 56 | Citations | CT |
EP000002573507B1 (EP 2 573 507 B1)
DE000019544917A1 (DE 195 44 917 A1)
|
| 56 | NPL citations | CTNP | TAKAHASHI, Akira ; MIWA, Nobuharu: An experimental verification of the compensation of length change of line scales caused by ambient air pressure. In: Measurement Science and Technology, Vol. 21, 2010, No. 4, Artikelnummer: 045305 (S. 1-7). - ISSN 0957-0233 (P); 1361-6501 (E). DOI: 10.1088/0957-0233/21/4/045305. URL: https://iopscience.iop.org/article/10.1088/0957-0233/21/4/045305/pdf [abgerufen am 2019-10-31] |
| 43 | Date of first publication | EVT | Jul 23, 2020 |
| Number of official communications (office actions) | | 1 |
| Number of responses | | 1 |
| Date of the first transfer into DPMAregister | EREGT | Jul 23, 2020 |
| Date of the (most recent) update in DPMAregister | REGT | Aug 8, 2025 (Show all update days)(Hide all update days)- Aug 8, 2025
- Aug 7, 2025
- St.36: changed (technical change)
- Oct 5, 2024
- Aug 7, 2024
- St.36: changed (technical change)
- Aug 8, 2023; Jul 1, 2021; May 25, 2021; Feb 6, 2021
- Historical data not available for this/these date(s)
- Jul 23, 2020
- Date of the first transfer into DPMAregister
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