Register information Patent

DE file number : 10 2019 109 878.5 (Status: pending/in force, Query started: August 9, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INID	Criterion	Field	Content
	Type of IP right	SART	Patent
	Status	ST	Pending/in force
21	DE file number	DAKZ	10 2019 109 878.5
54	Designation/title	TI	Verfahren zur Herstellung einer Halbleitervorrichtung und Halbleitervorrichtung
51	IPC main class	ICM (ICMV)	H10D 30/01 (2025.01)
51	IPC secondary class(es)	ICS (ICSV)	H10D 30/60 (2025.01), H10D 30/67 (2025.01)
22	DE application date	DAT	Apr 15, 2019
43	Date of first publication	OT	Mar 26, 2020
	Date of publication of grant	PET	Feb 13, 2025
71/73	Applicant/owner	INH	Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW
72	Inventor	IN	Holland, Martin Christopher, Hsinchu, TW; Van Dal, Marcus Johannes Henricus, Hsinchu, TW
74	Representative	VTR	BOEHMERT & BOEHMERT Anwaltspartnerschaft mbB - Patentanwälte Rechtsanwälte, 28359 Bremen, DE
10	Published DE documents	DEPN	Original document: DE102019109878A1 Searchable text: DE102019109878A1 Original document: DE102019109878B4 Searchable text: DE102019109878B4
	Address for service		BOEHMERT & BOEHMERT Anwaltspartnerschaft mbB - Patentanwälte Rechtsanwälte, 28359 Bremen, DE
33 31 32	Foreign priority	PRC PRNA PRDA	US 62/736,708 Sep 26, 2018
33 31 32	Foreign priority	PRC PRNA PRDA	US 16/370,722 Mar 29, 2019
	Due date	FT FG	Apr 30, 2026 Annual fee for the 8th year Patent fees
	Patent division in charge		33
56	Citations	CT	US020170154990A1 (US 2017 / 0 154 990 A1) US020060237746A1 (US 2006 / 0 237 746 A1) US020140008700A1 (US 2014 / 0 008 700 A1)
43	Date of first publication	EVT	Mar 26, 2020
	Number of official communications (office actions)		3
	Number of responses		3
	Date of the first transfer into DPMAregister	EREGT	Mar 26, 2020
	Date of the (most recent) update in DPMAregister	REGT	May 9, 2025 (Show all update days)(Hide all update days) May 9, 2025 Due date: changed May 7, 2025 St.36: changed (technical change) Feb 13, 2025 Published DE documents: changed Procedures: Publications, Patent specification, 13.02.2025: changed Jan 17, 2025 Procedures: Publications, Patent specification, 13.02.2025: new Jan 10, 2025 Date of publication of grant: new Jan 2, 2025 IPC main class: changed IPC secondary class(es): changed Procedures: Change of classification, Change of IPC main class, 22.11.2024: new Nov 9, 2024 Procedures: Examination procedure, Decision to grant patent , 08.11.2024: new Aug 16, 2024 St.36: changed (technical change) Mar 26, 2020 Date of the first transfer into DPMAregister

Procedural data
No.	Kind of procedure	Legal status	Date of legal/procedural status	Publication date	Alle Details anzeigen
1	Pre-registration procedure	The application is under preliminary examination	Apr 15, 2019		Details anzeigen
2	Examination procedure	Request for examination effectively filed	Apr 15, 2019		Details anzeigen
3	Pre-registration procedure	Pre-registration procedure has been concluded	May 17, 2019		Details anzeigen
4	Publications	Publication of application (Offenlegungsschrift)	Mar 26, 2020	Mar 26, 2020	Details anzeigen
5	Examination procedure	Official communication on examination	Jul 30, 2021		Details anzeigen
6	Examination procedure	Reply to official communication	Oct 21, 2021		Details anzeigen
7	Examination procedure	Official communication on examination	Jul 18, 2022		Details anzeigen
8	Examination procedure	Reply to official communication	Nov 21, 2022		Details anzeigen
9	Examination procedure	Official communication on examination	Jul 25, 2023		Details anzeigen
10	Examination procedure	Reply to official communication	Nov 30, 2023		Details anzeigen
11	Examination procedure	Decision to grant patent by Examining Section/Patent Division	Nov 8, 2024		Details anzeigen
12	Change of classification	Change of IPC main class	Nov 22, 2024	Jan 2, 2025	Details anzeigen
13	Publications	Patent specification	Feb 13, 2025	Feb 13, 2025	Details anzeigen

View procedures Pre-registration procedure (No.: 1)
Criterion	Field	Content Close details
Type of procedure	VART	Pre-registration procedure
Legal/procedural status	VST	The application is under preliminary examination
Date of legal/procedural status	VSTT	Apr 15, 2019

View procedures Examination procedure (No.: 2)
Criterion	Field	Content Close details
Type of procedure	VART	Examination procedure
Legal/procedural status	VST	Request for examination effectively filed
Date of legal/procedural status	VSTT	Apr 15, 2019
Third party request		No
Date of receipt	AEGT	Apr 15, 2019

View procedures Pre-registration procedure (No.: 3)
Criterion	Field	Content Close details
Type of procedure	VART	Pre-registration procedure
Legal/procedural status	VST	Pre-registration procedure has been concluded
Date of legal/procedural status	VSTT	May 17, 2019

View procedures Publications (No.: 4)
INID	Criterion	Field	Content Close details
	Type of procedure	VART	Publications
	Legal/procedural status	VST	Publication of application (Offenlegungsschrift)
	Date of legal/procedural status	VSTT	Mar 26, 2020
	Issue number	HN	13
	Year	PJ	2020
	Publication date	VT	Mar 26, 2020
	Type of publication	PART	Documents
	Part	HT	Part 2
10	Published DE documents	DEPN	Original document: DE102019109878A1 Searchable text: DE102019109878A1

View procedures Examination procedure (No.: 5)
Criterion	Field	Content Close details
Type of procedure	VART	Examination procedure
Legal/procedural status	VST	Official communication on examination
Date of legal/procedural status	VSTT	Jul 30, 2021
Date of update of the procedure	REGT	Jul 31, 2021

View procedures Examination procedure (No.: 6)
Criterion	Field	Content Close details
Type of procedure	VART	Examination procedure
Legal/procedural status	VST	Reply to official communication
Date of legal/procedural status	VSTT	Oct 21, 2021
Date of update of the procedure	REGT	Oct 23, 2021

View procedures Examination procedure (No.: 7)
Criterion	Field	Content Close details
Type of procedure	VART	Examination procedure
Legal/procedural status	VST	Official communication on examination
Date of legal/procedural status	VSTT	Jul 18, 2022
Date of update of the procedure	REGT	Jul 19, 2022

View procedures Examination procedure (No.: 8)
Criterion	Field	Content Close details
Type of procedure	VART	Examination procedure
Legal/procedural status	VST	Reply to official communication
Date of legal/procedural status	VSTT	Nov 21, 2022
Date of update of the procedure	REGT	Nov 23, 2022

View procedures Examination procedure (No.: 9)
Criterion	Field	Content Close details
Type of procedure	VART	Examination procedure
Legal/procedural status	VST	Official communication on examination
Date of legal/procedural status	VSTT	Jul 25, 2023
Date of update of the procedure	REGT	Jul 26, 2023

View procedures Examination procedure (No.: 10)
Criterion	Field	Content Close details
Type of procedure	VART	Examination procedure
Legal/procedural status	VST	Reply to official communication
Date of legal/procedural status	VSTT	Nov 30, 2023
Date of update of the procedure	REGT	Dec 2, 2023

View procedures Examination procedure (No.: 11)
Criterion	Field	Content Close details
Type of procedure	VART	Examination procedure
Legal/procedural status	VST	Decision to grant patent by Examining Section/Patent Division
Date of legal/procedural status	VSTT	Nov 8, 2024
Date of update of the procedure	REGT	Nov 9, 2024

View procedures Change of classification (No.: 12)
INID	Criterion	Field	Content Close details
	Type of procedure	VART	Change of classification
	Legal/procedural status	VST	Change of IPC main class
	Date of legal/procedural status	VSTT	Nov 22, 2024
	Issue number	HN	1
	Year	PJ	2025
	Publication date	VT	Jan 2, 2025
	Type of publication	PART	Bibliographic data
	Part	HT	Part 3
51	IPC main class	ICM (ICMV)	H10D 30/01 (2025.01)
51	Previous IPC main class	ICMF (ICMVF)	H01L 21/336 (2006.01)
	Date of update of the procedure	REGT	Jan 2, 2025

View procedures Publications (No.: 13)
INID	Criterion	Field	Content Close details
	Type of procedure	VART	Publications
	Legal/procedural status	VST	Patent specification
	Date of legal/procedural status	VSTT	Feb 13, 2025
	Issue number	HN	7
	Year	PJ	2025
	Publication date	VT	Feb 13, 2025
	Type of publication	PART	Documents
	Part	HT	Part 3
10	Published DE documents	DEPN	Original document: DE102019109878B4 Searchable text: DE102019109878B4
	Date of update of the procedure	REGT	Feb 13, 2025