Master dataINID | Criterion | Field | Content |
---|
| Type of IP right | SART | Patent |
| Status | ST | Pending/in force |
21 | DE file number | DAKZ | 10 2018 122 862.7 |
54 | Designation/title | TI | Verfahren zum Verbessern von Topografie dielektrischer Zwischenschichten |
51 | IPC main class | ICM (ICMV) | H01L 21/768 (2006.01) |
51 | IPC secondary class(es) | ICS (ICSV) | H01L 23/522 (2006.01), H10D 84/85 (2025.01), H10D 84/83 (2025.01), H10D 64/01 (2025.01) |
22 | DE application date | DAT | Sep 18, 2018 |
43 | Date of first publication | OT | Jan 2, 2020 |
71/73 | Applicant/owner | INH | Taiwan Semiconductor Manufacturing Co. Ltd., Hsin-Chu, TW |
72 | Inventor | IN | Su, Kuan-Wei, Hsin-Chu, TW; Huang, Chun Yu, Hsin-Chu, TW; Lin, Chih-Hsun, Hsin-Chu, TW; Hsieh, Ping-Pang, Hsinchu, TW |
74 | Representative | VTR | BOEHMERT & BOEHMERT Anwaltspartnerschaft mbB - Patentanwälte Rechtsanwälte, 28359 Bremen, DE |
10 | Published DE documents | DEPN | Original document:
DE102018122862A1 Searchable text:
DE102018122862A1 |
| Address for service | | BOEHMERT & BOEHMERT Anwaltspartnerschaft mbB - Patentanwälte Rechtsanwälte, 28359 Bremen, DE |
33 31 32
| Foreign priority | PRC PRNA PRDA
| US 62/690,377 Jun 27, 2018
|
33 31 32
| Foreign priority | PRC PRNA PRDA
| US 16/117,241 Aug 30, 2018
|
| Due date | FT FG | Sep 30, 2026 Annual fee for the 9th year
Patent fees |
| Patent division in charge | | 33 |
56 | Citations | CT |
EP000003229276A1 (EP 3 229 276 A1)
US020100059831A1 (US 2010 / 0 059 831 A1)
US020080224227A1 (US 2008 / 0 224 227 A1)
|
43 | Date of first publication | EVT | Jan 2, 2020 |
| Number of official communications (office actions) | | 3 |
| Number of responses | | 3 |
| Date of the first transfer into DPMAregister | EREGT | Jan 2, 2020 |
| Date of the (most recent) update in DPMAregister | REGT | Oct 8, 2025 (Show all update days)(Hide all update days)- Oct 8, 2025
- May 10, 2025
- Number of responses: changed
- Procedures: Examination procedure, Reply to official communication received, 02.05.2025: new
- May 6, 2025
- St.36: changed (technical change)
- Dec 24, 2024
- Number of official communications (office actions): changed
- Procedures: Examination procedure, Official communication on examination issued, 23.12.2024: new
- Nov 23, 2024
- IPC secondary class(es): changed
- Number of responses: changed
- Procedures: Examination procedure, Reply to official communication received, 21.11.2024: new
- Oct 8, 2024
- Jul 24, 2024
- Number of official communications (office actions): changed
- Procedures: Examination procedure, Official communication on examination issued, 23.07.2024: new
- May 23, 2024; Dec 19, 2023; Dec 14, 2023; Oct 6, 2023; Oct 13, 2022; Oct 9, 2021; Oct 9, 2020; Jul 23, 2020; Jul 1, 2020
- Historical data not available for this/these date(s)
- Jan 2, 2020
- Date of the first transfer into DPMAregister
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