Register information Patent

DE file number : 10 2015 115 329.7 (Status: pending/in force, Query started: June 17, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ10 2015 115 329.7
54Designation/titleTIVerfahren zur plasmaunterstützten Abscheidung von Aluminiumoxiddünnschichten auf Halbleiterwafern für die Herstellung von Wafersolarzellen und Inline-PECVD-Anlage
51IPC main classICM
(ICMV)		 C23C 16/455 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 C23C 16/40 (2006.01), C23C 16/54 (2006.01), H10F 71/00 (2025.01)
22DE application dateDATSep 11, 2015
43Date of first publicationOTMar 16, 2017
71/73Applicant/ownerINHHanwha Q CELLS GmbH, 06766 Bitterfeld-Wolfen, DE
72InventorINJunghänel, Matthias, 04275 Leipzig, DE; Schwabedissen, Axel, 04155 Leipzig, DE
74RepresentativeVTRadares PartGmbB, 10789 Berlin, DE
10Published DE documentsDEPNOriginal document: DE102015115329A1
Searchable text: DE102015115329A1
Address for service adares PartGmbB, 10789 Berlin, DE
Due dateFT
FG		Sep 30, 2025
Annual fee for the 11th year Patent fees
Patent division in charge 45
56CitationsCT[D]    DE000019812558B4 (DE 198 12 558 B4)
[X]    US020140057453A1 (US 2014 / 0 057 453 A1)
[X, Y]    WO002013050741A1 (WO 2013/ 050 741 A1)
[X]    US020040112537A1 (US 2004 / 0 112 537 A1)
[X]    DE000010239875A1 (DE 102 39 875 A1)
[Y]    JP002003249452A (JP 2003- 249 452 A)
[X, Y]    DE102012219667A1 (DE 10 2012 219 667 A1)
43Date of first publicationEVTMar 16, 2017
Number of official communications (office actions) 2
Number of responses 2
Date of the first transfer into DPMAregisterEREGTMar 16, 2017
Date of the (most recent) update in DPMAregisterREGTMar 26, 2025
(Show all update days)(Hide all update days)
  • Mar 26, 2025
    • Address for service: changed
  • Feb 20, 2025
    • IPC secondary class(es): changed
    • Representative: changed
    • Citations: changed
  • Oct 8, 2024
    • Citations: changed
  • Sep 27, 2024
    • Due date: changed
  • Aug 14, 2024
    • Citations: changed
  • May 3, 2024; Apr 27, 2024; Mar 23, 2024; Mar 15, 2024; Sep 29, 2023; Mar 23, 2023; Mar 22, 2023; Sep 30, 2022; May 14, 2022; Sep 30, 2021; Oct 6, 2020; Oct 9, 2019; Oct 3, 2018; Sep 29, 2017
    • Historical data not available for this/these date(s)
  • Mar 16, 2017
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Pre-registration procedure The application is under preliminary examination Sep 11, 2015  Details anzeigen
2 Examination procedure Request for examination effectively filed Oct 26, 2015  Details anzeigen
3 Pre-registration procedure Pre-registration procedure has been concluded Dec 8, 2015  Details anzeigen
4 Examination procedure Official communication on examination Jun 7, 2016  Details anzeigen
5 Examination procedure Reply to official communication Sep 9, 2016  Details anzeigen
6 Publications Publication of application (Offenlegungsschrift) Mar 16, 2017 Mar 16, 2017 Details anzeigen
7 Examination procedure Official communication on examination May 13, 2022  Details anzeigen
8 Examination procedure Reply to official communication Apr 25, 2024  Details anzeigen
View procedures Pre-registration procedure (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTPre-registration procedure
Legal/procedural statusVSTThe application is under preliminary examination
Date of legal/procedural statusVSTTSep 11, 2015
View procedures Examination procedure (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTRequest for examination effectively filed
Date of legal/procedural statusVSTTOct 26, 2015
Third party request No
Date of receiptAEGTSep 11, 2015
View procedures Pre-registration procedure (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPre-registration procedure
Legal/procedural statusVSTPre-registration procedure has been concluded
Date of legal/procedural statusVSTTDec 8, 2015
View procedures Examination procedure (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTOfficial communication on examination
Date of legal/procedural statusVSTTJun 7, 2016
View procedures Examination procedure (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTReply to official communication
Date of legal/procedural statusVSTTSep 9, 2016
View procedures Publications (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of application (Offenlegungsschrift)
Date of legal/procedural statusVSTTMar 16, 2017
Issue numberHN11
YearPJ2017
Publication dateVTMar 16, 2017
Type of publicationPARTDocuments
PartHTPart 2
10Published DE documentsDEPNOriginal document: DE102015115329A1
Searchable text: DE102015115329A1
View procedures Examination procedure (No.: 7)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTOfficial communication on examination
Date of legal/procedural statusVSTTMay 13, 2022
Date of update of the procedureREGTMay 14, 2022
View procedures Examination procedure (No.: 8)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTReply to official communication
Date of legal/procedural statusVSTTApr 25, 2024
Date of update of the procedureREGTMay 3, 2024