Register information Patent

DE file number : 10 2014 100 005.6 (Status: pending/in force, Query started: May 26, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ10 2014 100 005.6
54Designation/titleTIBeschichtung aus Resist auf ein Substrat für ultrahochauflösende Lithographie
51IPC main classICM
(ICMV)		 H01L 21/027 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 G03F 7/00 (2006.01)
22DE application dateDATJan 2, 2014
43Date of first publicationOTDec 4, 2014
Date of publication of grantPETAug 14, 2024
71/73Applicant/ownerINHAMO GmbH, 52074 Aachen, DE
72InventorINKurz, Heinrich, Dr., 52076 Aachen, DE; Jung Wuk, Kim, 52064 Aachen, DE; Bolten, Jens, 52070 Aachen, DE; Moorman, Christian, 52074 Aachen, DE
74RepresentativeVTRPatentanwälte Bauer Vorberg Kayser Partnerschaft mbB, 50968 Köln, DE
10Published DE documentsDEPNOriginal document: DE102014100005A1
Searchable text: DE102014100005A1
Original document: DE102014100005B4
Searchable text: DE102014100005B4
Address for service Patentanwälte Bauer Vorberg Kayser Partnerschaft mbB, 50968 Köln, DE
66
66
Domestic priorityPRN
PRD
10 2013 210 111.2
May 29, 2013
Due dateFT
FG		Jan 31, 2025
Annual fee for the 12th year Patent fees
Patent division in charge 33
56CitationsCT[A]    DE102009046756A1 (DE 10 2009 046 756 A1)
43Date of first publicationEVTDec 4, 2014
Number of official communications (office actions) 1
Number of responses 1
Date of the first transfer into DPMAregisterEREGTDec 4, 2014
Date of the (most recent) update in DPMAregisterREGTApr 12, 2025
(Show all update days)(Hide all update days)
  • Apr 12, 2025
    • St.36: changed (technical change)
  • Aug 14, 2024
    • Published DE documents: changed
    • Procedures: Publications, Patent specification, 14.08.2024: changed
  • Jul 19, 2024
    • Date of publication of grant: new
    • Procedures: Publications, Patent specification, 14.08.2024: new
  • May 1, 2024; Apr 30, 2024; Jan 26, 2024; Jan 11, 2024; Jun 28, 2023; Jan 31, 2023; Jan 27, 2022; Feb 3, 2021; Jan 15, 2021; Feb 4, 2020; Feb 6, 2019; Mar 1, 2018; Feb 4, 2017; Feb 6, 2016; Jun 10, 2015
    • Historical data not available for this/these date(s)
  • Dec 4, 2014
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Pre-registration procedure The application is under preliminary examination Jan 2, 2014  Details anzeigen
2 Pre-registration procedure Pre-registration procedure has been concluded Feb 26, 2014  Details anzeigen
3 Publications Publication of application (Offenlegungsschrift) Dec 4, 2014 Dec 4, 2014 Details anzeigen
4 Examination procedure Request for examination effectively filed Dec 16, 2020 Feb 25, 2021 Details anzeigen
5 Examination procedure Official communication on examination Jun 27, 2023  Details anzeigen
6 Examination procedure Reply to official communication Jan 3, 2024  Details anzeigen
7 Examination procedure Decision to grant patent by Examining Section/Patent Division Apr 30, 2024  Details anzeigen
8 Publications Patent specification Aug 14, 2024 Aug 14, 2024 Details anzeigen
View procedures Pre-registration procedure (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTPre-registration procedure
Legal/procedural statusVSTThe application is under preliminary examination
Date of legal/procedural statusVSTTJan 2, 2014
View procedures Pre-registration procedure (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTPre-registration procedure
Legal/procedural statusVSTPre-registration procedure has been concluded
Date of legal/procedural statusVSTTFeb 26, 2014
View procedures Publications (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of application (Offenlegungsschrift)
Date of legal/procedural statusVSTTDec 4, 2014
Issue numberHN49
YearPJ2014
Publication dateVTDec 4, 2014
Type of publicationPARTDocuments
PartHTPart 2
10Published DE documentsDEPNOriginal document: DE102014100005A1
Searchable text: DE102014100005A1
View procedures Examination procedure (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTRequest for examination effectively filed
Date of legal/procedural statusVSTTDec 16, 2020
Issue numberHN8
YearPJ2021
Publication dateVTFeb 25, 2021
Type of publicationPARTBibliographic data
PartHTPart 2
Third party request No
Date of receiptAEGTDec 16, 2020
Date of update of the procedureREGTFeb 3, 2021
View procedures Examination procedure (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTOfficial communication on examination
Date of legal/procedural statusVSTTJun 27, 2023
Date of update of the procedureREGTJun 28, 2023
View procedures Examination procedure (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTReply to official communication
Date of legal/procedural statusVSTTJan 3, 2024
Date of update of the procedureREGTJan 11, 2024
View procedures Examination procedure (No.: 7)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTDecision to grant patent by Examining Section/Patent Division
Date of legal/procedural statusVSTTApr 30, 2024
Date of update of the procedureREGTMay 1, 2024
View procedures Publications (No.: 8)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPatent specification
Date of legal/procedural statusVSTTAug 14, 2024
Issue numberHN33
YearPJ2024
Publication dateVTAug 14, 2024
Type of publicationPARTDocuments
PartHTPart 3
10Published DE documentsDEPNOriginal document: DE102014100005B4
Searchable text: DE102014100005B4
Date of update of the procedureREGTAug 14, 2024