Register information Patent

DE file number : 10 2014 008 031.5 (Status: pending/in force, Query started: August 2, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ10 2014 008 031.5
54Designation/titleTIElektrostatische Haltevorrichtung mit einer Keramik-Elektrode und Verfahren zur Herstellung einer solchen Haltevorrichtung
51IPC main classICM
(ICMV)		 H01L 21/683 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 H02N 13/00 (2006.01)
22DE application dateDATMay 28, 2014
43Date of first publicationOTDec 3, 2015
Date of publication of grantPETJun 25, 2020
71/73Applicant/ownerINHASML Netherlands B.V., Veldhoven, NL
72InventorINBaldus, Oliver, 12555 Berlin, DE
74RepresentativeVTRv. Bezold & Partner Patentanwälte - PartG mbB, 80339 München, DE
10Published DE documentsDEPNOriginal document: DE102014008031A1
Searchable text: DE102014008031A1
Original document: DE102014008031B4
Searchable text: DE102014008031B4
Address for service v. Bezold & Partner Patentanwälte - PartG mbB, 80339 München, DE
Due dateFT
FG		May 31, 2026
Annual fee for the 13th year Patent fees
Patent division in charge 36
56CitationsCT[Y]    US020100039747A1 (US 2010 / 0 039 747 A1)
[Y]    US020140042716A1 (US 2014 / 0 042 716 A1)
[X]    US000005535090A (US 5 535 090 A)
[Y]    US020050181617A1 (US 2005 / 0 181 617 A1)
US020130308116A1 (US 2013 / 0 308 116 A1)
US000004502094A (US 4 502 094 A)
43Date of first publicationEVTDec 3, 2015
Number of official communications (office actions) 0
Number of responses 0
Date of the first transfer into DPMAregisterEREGTDec 2, 2015
Date of the (most recent) update in DPMAregisterREGTJun 12, 2025
(Show all update days)(Hide all update days)
  • Jun 12, 2025
    • Due date: changed
  • Jun 10, 2025
    • St.36: changed (technical change)
  • Aug 16, 2024
    • Citations: changed
  • Dec 2, 2015
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Pre-registration procedure The application is under preliminary examination May 28, 2014  Details anzeigen
2 Search procedure Request for search effectively filed May 28, 2014  Details anzeigen
3 Pre-registration procedure Pre-registration procedure has been concluded Sep 9, 2014  Details anzeigen
4 Search procedure Information on identified prior art provided Dec 18, 2014  Details anzeigen
5 Publications Publication of application (Offenlegungsschrift) Dec 3, 2015 Dec 3, 2015 Details anzeigen
6 Examination procedure Request for examination effectively filed Sep 27, 2017 Nov 9, 2017 Details anzeigen
7 Examination procedure Decision to grant patent by Examining Section/Patent Division Feb 28, 2020  Details anzeigen
8 Publications Patent specification Jun 25, 2020 Jun 25, 2020 Details anzeigen
9 Examination procedure Grant of patent has become final Mar 26, 2021 Jun 2, 2021 Details anzeigen
10 New applicant/owner details New applicant/owner details Jun 18, 2021 Jul 29, 2021 Details anzeigen
11 New applicant/owner details New applicant/owner details Feb 28, 2022 Apr 7, 2022 Details anzeigen
View procedures Pre-registration procedure (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTPre-registration procedure
Legal/procedural statusVSTThe application is under preliminary examination
Date of legal/procedural statusVSTTMay 28, 2014
View procedures Search procedure (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTSearch procedure
Legal/procedural statusVSTRequest for search effectively filed
Date of legal/procedural statusVSTTMay 28, 2014
Third party request No
Date of receiptAEGTMay 28, 2014
View procedures Pre-registration procedure (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPre-registration procedure
Legal/procedural statusVSTPre-registration procedure has been concluded
Date of legal/procedural statusVSTTSep 9, 2014
View procedures Search procedure (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTSearch procedure
Legal/procedural statusVSTInformation on identified prior art provided
Date of legal/procedural statusVSTTDec 18, 2014
Third party request No
Date of receiptAEGTMay 28, 2014
View procedures Publications (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of application (Offenlegungsschrift)
Date of legal/procedural statusVSTTDec 3, 2015
Issue numberHN49
YearPJ2015
Publication dateVTDec 3, 2015
Type of publicationPARTDocuments
PartHTPart 2
10Published DE documentsDEPNOriginal document: DE102014008031A1
Searchable text: DE102014008031A1
View procedures Examination procedure (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTRequest for examination effectively filed
Date of legal/procedural statusVSTTSep 27, 2017
Issue numberHN45
YearPJ2017
Publication dateVTNov 9, 2017
Type of publicationPARTBibliographic data
PartHTPart 2
Third party request No
Date of receiptAEGTSep 27, 2017
View procedures Examination procedure (No.: 7)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTDecision to grant patent by Examining Section/Patent Division
Date of legal/procedural statusVSTTFeb 28, 2020
View procedures Publications (No.: 8)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPatent specification
Date of legal/procedural statusVSTTJun 25, 2020
Issue numberHN26
YearPJ2020
Publication dateVTJun 25, 2020
Type of publicationPARTDocuments
PartHTPart 3
10Published DE documentsDEPNOriginal document: DE102014008031B4
Searchable text: DE102014008031B4
View procedures Examination procedure (No.: 9)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTGrant of patent has become final
Date of legal/procedural statusVSTTMar 26, 2021
Issue numberHN22
YearPJ2021
Publication dateVTJun 2, 2021
Type of publicationPARTBibliographic data
PartHTPart 3
Date of update of the procedureREGTJun 2, 2021
View procedures New applicant/owner details (No.: 10)
INIDCriterionFieldContent Close details
Type of procedureVARTNew applicant/owner details
Legal/procedural statusVSTNew applicant/owner details
Date of legal/procedural statusVSTTJun 18, 2021
Issue numberHN30
YearPJ2021
Publication dateVTJul 29, 2021
Type of publicationPARTBibliographic data
PartHTPart 3
71/73Applicant/ownerINHBerliner Glas GmbH, 12347 Berlin, DE
71/73Previous applicant/ownerINHFBerliner Glas KGaA Herbert Kubatz GmbH & Co., 12347 Berlin, DE
Date of update of the procedureREGTJul 15, 2021
View procedures New applicant/owner details (No.: 11)
INIDCriterionFieldContent Close details
Type of procedureVARTNew applicant/owner details
Legal/procedural statusVSTNew applicant/owner details
Date of legal/procedural statusVSTTFeb 28, 2022
Issue numberHN14
YearPJ2022
Publication dateVTApr 7, 2022
Type of publicationPARTBibliographic data
PartHTPart 3
71/73Applicant/ownerINHASML Netherlands B.V., Veldhoven, NL
71/73Previous applicant/ownerINHFBerliner Glas GmbH, 12347 Berlin, DE
Date of update of the procedureREGTApr 7, 2022