Register information Patent

DE file number : 10 2014 007 903.1 (Status: pending/in force, Query started: August 3, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INID	Criterion	Field	Content
	Type of IP right	SART	Patent
	Status	ST	Pending/in force
21	DE file number	DAKZ	10 2014 007 903.1
54	Designation/title	TI	Elektrostatische Haltevorrichtung mit Noppen-Elektroden und Verfahren zu deren Herstellung
51	IPC main class	ICM (ICMV)	H01L 21/683 (2006.01)
51	IPC secondary class(es)	ICS (ICSV)	H02N 13/00 (2006.01)
22	DE application date	DAT	May 28, 2014
43	Date of first publication	OT	Dec 3, 2015
	Date of publication of grant	PET	Apr 3, 2025
71/73	Applicant/owner	INH	ASML Netherlands B.V., Veldhoven, NL
72	Inventor	IN	Baldus, Oliver, 12555 Berlin, DE
74	Representative	VTR	v. Bezold & Partner Patentanwälte - PartG mbB, 80339 München, DE
10	Published DE documents	DEPN	Original document: DE102014007903A1 Searchable text: DE102014007903A1 Original document: DE102014007903B4 Searchable text: DE102014007903B4
	Address for service		v. Bezold & Partner Patentanwälte - PartG mbB, 80339 München, DE
	Due date	FT FG	May 31, 2026 Annual fee for the 13th year Patent fees
	Patent division in charge		36
56	Citations	CT	[A, D] US000004502094A (US 4 502 094 A) [A, D] US000008476167B2 (US 8 476 167 B2)
43	Date of first publication	EVT	Dec 3, 2015
	Number of official communications (office actions)		1
	Number of responses		1
	Date of the first transfer into DPMAregister	EREGT	Dec 2, 2015
	Date of the (most recent) update in DPMAregister	REGT	Jun 12, 2025 (Show all update days)(Hide all update days) Jun 12, 2025 Due date: changed Jun 10, 2025 St.36: changed (technical change) Apr 3, 2025 Published DE documents: changed Procedures: Publications, Patent specification, 03.04.2025: changed Mar 7, 2025 Date of publication of grant: new Procedures: Publications, Patent specification, 03.04.2025: new Dec 19, 2024 Procedures: Examination procedure, Decision to grant patent , 18.12.2024: new Dec 14, 2024 Number of responses: changed Procedures: Examination procedure, Reply to official communication received, 05.12.2024: new Sep 13, 2024 Number of official communications (office actions): changed Procedures: Examination procedure, Official communication on examination issued, 12.09.2024: new Aug 16, 2024 St.36: changed (technical change) Dec 2, 2015 Date of the first transfer into DPMAregister

Procedural data
No.	Kind of procedure	Legal status	Date of legal/procedural status	Publication date	Alle Details anzeigen
1	Pre-registration procedure	The application is under preliminary examination	May 28, 2014		Details anzeigen
2	Search procedure	Request for search effectively filed	May 28, 2014		Details anzeigen
3	Pre-registration procedure	Pre-registration procedure has been concluded	Jul 29, 2014		Details anzeigen
4	New applicant/owner details	New applicant/owner details	Jul 29, 2014	Jul 29, 2021	Details anzeigen
5	Search procedure	Information on identified prior art provided	Dec 18, 2014		Details anzeigen
6	Publications	Publication of application (Offenlegungsschrift)	Dec 3, 2015	Dec 3, 2015	Details anzeigen
7	Examination procedure	Request for examination effectively filed	Mar 23, 2021	May 6, 2021	Details anzeigen
8	New applicant/owner details	New applicant/owner details	Jun 18, 2021	Jul 29, 2021	Details anzeigen
9	New applicant/owner details	New applicant/owner details	Feb 28, 2022	Apr 7, 2022	Details anzeigen
10	Examination procedure	Official communication on examination	Sep 12, 2024		Details anzeigen
11	Examination procedure	Reply to official communication	Dec 5, 2024		Details anzeigen
12	Examination procedure	Decision to grant patent by Examining Section/Patent Division	Dec 18, 2024		Details anzeigen
13	Publications	Patent specification	Apr 3, 2025	Apr 3, 2025	Details anzeigen

View procedures Pre-registration procedure (No.: 1)
Criterion	Field	Content Close details
Type of procedure	VART	Pre-registration procedure
Legal/procedural status	VST	The application is under preliminary examination
Date of legal/procedural status	VSTT	May 28, 2014

View procedures Search procedure (No.: 2)
Criterion	Field	Content Close details
Type of procedure	VART	Search procedure
Legal/procedural status	VST	Request for search effectively filed
Date of legal/procedural status	VSTT	May 28, 2014
Third party request		No
Date of receipt	AEGT	May 28, 2014

View procedures Pre-registration procedure (No.: 3)
Criterion	Field	Content Close details
Type of procedure	VART	Pre-registration procedure
Legal/procedural status	VST	Pre-registration procedure has been concluded
Date of legal/procedural status	VSTT	Jul 29, 2014

View procedures New applicant/owner details (No.: 4)
INID	Criterion	Field	Content Close details
	Type of procedure	VART	New applicant/owner details
	Legal/procedural status	VST	New applicant/owner details
	Date of legal/procedural status	VSTT	Jul 29, 2014
	Issue number	HN	30
	Year	PJ	2021
	Publication date	VT	Jul 29, 2021
	Type of publication	PART	Bibliographic data
	Part	HT	Part 2
71/73	Applicant/owner	INH	Berliner Glas KGaA Herbert Kubatz GmbH & Co., 12347 Berlin, DE
71/73	Previous applicant/owner	INHF	Berliner Glas KGaA Herbert Kubatz GmbH & Co, 12347 Berlin, DE
	Date of update of the procedure	REGT	Jul 15, 2021

View procedures Search procedure (No.: 5)
Criterion	Field	Content Close details
Type of procedure	VART	Search procedure
Legal/procedural status	VST	Information on identified prior art provided
Date of legal/procedural status	VSTT	Dec 18, 2014
Third party request		No
Date of receipt	AEGT	May 28, 2014

View procedures Publications (No.: 6)
INID	Criterion	Field	Content Close details
	Type of procedure	VART	Publications
	Legal/procedural status	VST	Publication of application (Offenlegungsschrift)
	Date of legal/procedural status	VSTT	Dec 3, 2015
	Issue number	HN	49
	Year	PJ	2015
	Publication date	VT	Dec 3, 2015
	Type of publication	PART	Documents
	Part	HT	Part 2
10	Published DE documents	DEPN	Original document: DE102014007903A1 Searchable text: DE102014007903A1

View procedures Examination procedure (No.: 7)
Criterion	Field	Content Close details
Type of procedure	VART	Examination procedure
Legal/procedural status	VST	Request for examination effectively filed
Date of legal/procedural status	VSTT	Mar 23, 2021
Issue number	HN	18
Year	PJ	2021
Publication date	VT	May 6, 2021
Type of publication	PART	Bibliographic data
Part	HT	Part 2
Third party request		No
Date of receipt	AEGT	Mar 23, 2021
Date of update of the procedure	REGT	May 6, 2021

View procedures New applicant/owner details (No.: 8)
INID	Criterion	Field	Content Close details
	Type of procedure	VART	New applicant/owner details
	Legal/procedural status	VST	New applicant/owner details
	Date of legal/procedural status	VSTT	Jun 18, 2021
	Issue number	HN	30
	Year	PJ	2021
	Publication date	VT	Jul 29, 2021
	Type of publication	PART	Bibliographic data
	Part	HT	Part 2
71/73	Applicant/owner	INH	Berliner Glas GmbH, 12347 Berlin, DE
71/73	Previous applicant/owner	INHF	Berliner Glas KGaA Herbert Kubatz GmbH & Co., 12347 Berlin, DE
	Date of update of the procedure	REGT	Jul 15, 2021

View procedures New applicant/owner details (No.: 9)
INID	Criterion	Field	Content Close details
	Type of procedure	VART	New applicant/owner details
	Legal/procedural status	VST	New applicant/owner details
	Date of legal/procedural status	VSTT	Feb 28, 2022
	Issue number	HN	14
	Year	PJ	2022
	Publication date	VT	Apr 7, 2022
	Type of publication	PART	Bibliographic data
	Part	HT	Part 2
71/73	Applicant/owner	INH	ASML Netherlands B.V., Veldhoven, NL
71/73	Previous applicant/owner	INHF	Berliner Glas GmbH, 12347 Berlin, DE
	Date of update of the procedure	REGT	Mar 25, 2022

View procedures Examination procedure (No.: 10)
Criterion	Field	Content Close details
Type of procedure	VART	Examination procedure
Legal/procedural status	VST	Official communication on examination
Date of legal/procedural status	VSTT	Sep 12, 2024
Date of update of the procedure	REGT	Sep 13, 2024

View procedures Examination procedure (No.: 11)
Criterion	Field	Content Close details
Type of procedure	VART	Examination procedure
Legal/procedural status	VST	Reply to official communication
Date of legal/procedural status	VSTT	Dec 5, 2024
Date of update of the procedure	REGT	Dec 14, 2024

View procedures Examination procedure (No.: 12)
Criterion	Field	Content Close details
Type of procedure	VART	Examination procedure
Legal/procedural status	VST	Decision to grant patent by Examining Section/Patent Division
Date of legal/procedural status	VSTT	Dec 18, 2024
Date of update of the procedure	REGT	Dec 19, 2024

View procedures Publications (No.: 13)
INID	Criterion	Field	Content Close details
	Type of procedure	VART	Publications
	Legal/procedural status	VST	Patent specification
	Date of legal/procedural status	VSTT	Apr 3, 2025
	Issue number	HN	14
	Year	PJ	2025
	Publication date	VT	Apr 3, 2025
	Type of publication	PART	Documents
	Part	HT	Part 3
10	Published DE documents	DEPN	Original document: DE102014007903B4 Searchable text: DE102014007903B4
	Date of update of the procedure	REGT	Apr 3, 2025