Register information Patent

DE file number : 10 2009 054 868.8 (Status: not pending/lapsed, Query started: June 7, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTNot pending/lapsed
21DE file number DAKZ10 2009 054 868.8
54Designation/titleTIVerfahren und Vorrichtung zum Einstellen eines Ansteuerdrucks, Manipulator für ein optisches System und optisches System
51IPC main classICM
(ICMV)		 G02B 7/00 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 G02B 7/08 (2006.01), G03F 7/20 (2006.01)
22DE application dateDATDec 17, 2009
43Date of first publicationOTAug 12, 2010
71/73Applicant/ownerINHCarl Zeiss SMT AG, 73447 Oberkochen, DE
72InventorINMeenken, Thomas, 73460 Hüttlingen, DE
10Published DE documentsDEPNOriginal document: DE102009054868A1
Searchable text: DE102009054868A1
Address for service Herrn Dr. Thomas Okon Carl Zeiss AG Abt. KRP-PS, 73447 Oberkochen, DE
66
66
Domestic priorityPRN
PRD
10 2009 008 721.4
Feb 6, 2009
Patent division in charge 51
57AbstractABDie Erfindung betrifft ein Verfahren und eine Vorrichtung zum Einstellen eines Ansteuerdrucks (p↑*↑) für ein Stellelement (3), insbesondere für ein Stellelement (3) eines Manipulators (5), wobei ein Arbeitsdruck (p) in den Ansteuerdruck (p↑*↑) mit einem variierbaren Übersetzungsverhältnis (mD) übersetzt wird. Die Erfindung betrifft weiter einen Manipulator für ein optisches System, insbesondere ein Projektionsobjektiv einer Projektionsbelichtungsanlage, und ein optisches System, insbesondere ein Projektionsobjektiv.
43Date of first publicationEVTAug 12, 2010
Number of official communications (office actions) 0
Number of responses 0
Date of the first transfer into DPMAregisterEREGTMay 26, 2011
Date of the (most recent) update in DPMAregisterREGTFeb 14, 2013
(Show all update days)(Hide all update days)
  • Feb 14, 2013; Jun 2, 2011
    • Historical data not available for this/these date(s)
  • May 26, 2011
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Pre-registration procedure The application is under preliminary examination Dec 17, 2009  Details anzeigen
2 Pre-registration procedure Pre-registration procedure has been concluded Mar 17, 2010  Details anzeigen
3 Publications Request for early publication of application (Offenlegung) May 21, 2010  Details anzeigen
4 Publications Publication of application (Offenlegungsschrift) Aug 12, 2010 Aug 12, 2010 Details anzeigen
5 Administrative procedure The application was withdrawn/the IP right was waived Aug 27, 2010 Nov 4, 2010 Details anzeigen
View procedures Pre-registration procedure (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTPre-registration procedure
Legal/procedural statusVSTThe application is under preliminary examination
Date of legal/procedural statusVSTTDec 17, 2009
View procedures Pre-registration procedure (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTPre-registration procedure
Legal/procedural statusVSTPre-registration procedure has been concluded
Date of legal/procedural statusVSTTMar 17, 2010
View procedures Publications (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTRequest for early publication of application (Offenlegung)
Date of legal/procedural statusVSTTMay 21, 2010
10Published DE documentsDEPNOriginal document: DE102009054868A1
Searchable text: DE102009054868A1
View procedures Publications (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of application (Offenlegungsschrift)
Date of legal/procedural statusVSTTAug 12, 2010
Issue numberHN32
YearPJ2010
Publication dateVTAug 12, 2010
Type of publicationPARTDocuments
PartHTPart 2
10Published DE documentsDEPNOriginal document: DE102009054868A1
Searchable text: DE102009054868A1
View procedures Administrative procedure (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTAdministrative procedure
Legal/procedural statusVSTThe application was withdrawn/the IP right was waived
Date of legal/procedural statusVSTTAug 27, 2010
Issue numberHN44
YearPJ2010
Publication dateVTNov 4, 2010
Type of publicationPARTBibliographic data
PartHTPart 2