Register information Patent

DE file number : 10 2005 017 288.1 (Status: not pending/lapsed, Query started: May 10, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INID	Criterion	Field	Content
	Type of IP right	SART	Patent
	Status	ST	Not pending/lapsed
21	DE file number	DAKZ	10 2005 017 288.1
54	Designation/title	TI	Verfahren zur Herstellung einer Halbleitervorrichtung mit einem Graben in einem Siliziumcarbid-Halbleitersubstrat
51	IPC main class	ICM (ICMV)	H01L 21/337 (2006.01)
51	IPC secondary class(es)	ICS (ICSV)	H01L 21/336 (2006.01), H01L 29/04 (2006.01), H01L 29/12 (2006.01)
22	DE application date	DAT	Apr 14, 2005
43	Date of first publication	OT	Nov 3, 2005
	Date of publication of grant	PET	Nov 22, 2012
71/73	Applicant/owner	INH	DENSO CORPORATION, Kariya-city, Aichi-pref., JP
72	Inventor	IN	Takeuchi, Yuuichi, Kariya-city, Aichi-pref., JP; Malhan, Rajesh Kumar, Kariya-city, Aichi-pref., JP; Matsunami, Hiroyuki, Yawata-city, Kyoto-pref., JP; Kimoto, Tsunenobu, Kyoto-city, Kyoto-pref., JP
74	Representative	VTR	Winter, Brandl - Partnerschaft mbB, Patentanwälte, 85354 Freising, DE
10	Published DE documents	DEPN	Original document: DE102005017288A1 Searchable text: DE102005017288A1 Original document: DE102005017288B4 Searchable text: DE102005017288B4 Original document: DE102005017288B8 Searchable text: DE102005017288B8
	Address for service		Winter, Brandl - Partnerschaft mbB, Patentanwälte, 85354 Freising, DE
33 31 32	Foreign priority	PRC PRNA PRDA	JP 2004-118890 Apr 14, 2004
33 31 32	Foreign priority	PRC PRNA PRDA	JP 2004-193459 Jun 30, 2004
33 31 32	Foreign priority	PRC PRNA PRDA	JP 2004-193460 Jun 30, 2004
	Licence	LIZ	Willingness to grant licences to anyone declared
	Patent division in charge		33
57	Abstract	AB	Ein Verfahren zur Herstellung einer Siliziumcarbid-Halbleitervorrichtung weist die Schritte auf: Ausbilden einer Grabenmaske (21) auf einer oberen Oberfläche eines Halbleitersubstrats (20); Ausbilden eines Grabens (6), derart, dass der Graben (6) ein Längen- oder Streckenverhältnis von gleich oder größer als 2 hat und einen Grabenneigungs- oder Böschungswinkel von gleich oder mehr als 80° hat; und Entfernen eines Schadensbereichs, derart, dass der Schadensbereich, der an einer inneren Oberfläche des Grabens (6) in dem Halbleitersubstrat (20) liegt und beim Schritt des Ausbildens des Grabens (6) gebildet wurde, in einer Wasserstoffatmosphäre unter Unterdruck bei einer Temperatur von gleich oder mehr als 1600°C geätzt und entfernt wird.
56	Citations	CT	DE000010127231A1 (DE 101 27 231 A1) JP002003218036A (JP 2003- 218 036 A)
43	Date of first publication	EVT	Nov 3, 2005
	Number of official communications (office actions)		1
	Number of responses		1
	Date of the first transfer into DPMAregister	EREGT	May 27, 2011
	Date of the (most recent) update in DPMAregister	REGT	Feb 9, 2023 (Show all update days)(Hide all update days) Feb 9, 2023; Dec 20, 2022; Apr 28, 2021; Jan 27, 2021; Jan 5, 2021; Apr 28, 2020; May 3, 2019; May 3, 2018; May 6, 2017; May 3, 2016; Jan 22, 2016; May 8, 2015; May 6, 2015; Aug 19, 2014; Aug 16, 2014; Jun 24, 2014; Jun 21, 2014; Jun 18, 2014; May 24, 2014; May 8, 2014; Apr 30, 2014; Feb 25, 2014; Nov 14, 2013; Sep 24, 2013; Sep 21, 2013; Sep 20, 2013; Aug 1, 2013; May 29, 2013; May 24, 2013; May 8, 2013; Apr 11, 2013; Jan 31, 2013; Jan 27, 2013; Dec 21, 2012; Dec 12, 2012; Dec 6, 2012; Nov 27, 2012; Nov 22, 2012; Oct 3, 2012; Jul 14, 2012; Jul 13, 2012; May 12, 2012; May 5, 2012; May 1, 2012; Nov 2, 2011; Oct 5, 2011; Aug 18, 2011; Jul 21, 2011; Jul 17, 2011; Jun 23, 2011; Jun 22, 2011 Historical data not available for this/these date(s) May 27, 2011 Date of the first transfer into DPMAregister

Procedural data
No.	Kind of procedure	Legal status	Date of legal/procedural status	Publication date	Alle Details anzeigen
1	Pre-registration procedure	The application is under preliminary examination	Apr 14, 2005		Details anzeigen
2	Pre-registration procedure	Pre-registration procedure has been concluded	Jun 6, 2005		Details anzeigen
3	Change of classification	Change of IPC main class	Oct 17, 2005		Details anzeigen
4	Publications	Publication of application (Offenlegungsschrift)	Nov 3, 2005	Nov 3, 2005	Details anzeigen
5	Examination procedure	Request for examination effectively filed	Apr 5, 2011	Jun 22, 2011	Details anzeigen
6	Examination procedure	Official communication on examination	May 12, 2011		Details anzeigen
7	Examination procedure	Reply to official communication	Jul 8, 2011		Details anzeigen
8	Publications	Citations modified after publication	Jul 21, 2011	Jul 21, 2011	Details anzeigen
9	Examination procedure	Decision to grant patent by Examining Section/Patent Division	Jul 13, 2012		Details anzeigen
10	Publications	Patent specification	Nov 22, 2012	Nov 22, 2012	Details anzeigen
11	Publications	Patent specification: Correction of defective title pages	Jan 31, 2013	Jan 31, 2013	Details anzeigen
12	Examination procedure	Grant of patent has become final	Feb 23, 2013	May 29, 2013	Details anzeigen
13	Licence	Willingness to grant licences declared	Sep 17, 2013	Nov 14, 2013	Details anzeigen
14	Administrative procedure	Application is deemed to be withdrawn due to non-payment of annual fee/ IP right has lapsed due to non-payment of annual fee	Nov 3, 2022	Feb 9, 2023	Details anzeigen

View procedures Pre-registration procedure (No.: 1)
Criterion	Field	Content Close details
Type of procedure	VART	Pre-registration procedure
Legal/procedural status	VST	The application is under preliminary examination
Date of legal/procedural status	VSTT	Apr 14, 2005

View procedures Pre-registration procedure (No.: 2)
Criterion	Field	Content Close details
Type of procedure	VART	Pre-registration procedure
Legal/procedural status	VST	Pre-registration procedure has been concluded
Date of legal/procedural status	VSTT	Jun 6, 2005

View procedures Change of classification (No.: 3)
INID	Criterion	Field	Content Close details
	Type of procedure	VART	Change of classification
	Legal/procedural status	VST	Change of IPC main class
	Date of legal/procedural status	VSTT	Oct 17, 2005
51	IPC main class	ICM (ICMV)	H01L 21/337 (2006.01)
51	Previous IPC main class	ICMF (ICMVF)	H01L 21/337 (2000.01)

View procedures Publications (No.: 4)
INID	Criterion	Field	Content Close details
	Type of procedure	VART	Publications
	Legal/procedural status	VST	Publication of application (Offenlegungsschrift)
	Date of legal/procedural status	VSTT	Nov 3, 2005
	Issue number	HN	44
	Year	PJ	2005
	Publication date	VT	Nov 3, 2005
	Type of publication	PART	Documents
	Part	HT	Part 2
10	Published DE documents	DEPN	Original document: DE102005017288A1 Searchable text: DE102005017288A1

View procedures Examination procedure (No.: 5)
Criterion	Field	Content Close details
Type of procedure	VART	Examination procedure
Legal/procedural status	VST	Request for examination effectively filed
Date of legal/procedural status	VSTT	Apr 5, 2011
Issue number	HN	25
Year	PJ	2011
Publication date	VT	Jun 22, 2011
Type of publication	PART	Bibliographic data
Part	HT	Part 2
Third party request		No
Date of receipt	AEGT	Apr 5, 2011

View procedures Examination procedure (No.: 6)
Criterion	Field	Content Close details
Type of procedure	VART	Examination procedure
Legal/procedural status	VST	Official communication on examination
Date of legal/procedural status	VSTT	May 12, 2011

View procedures Examination procedure (No.: 7)
Criterion	Field	Content Close details
Type of procedure	VART	Examination procedure
Legal/procedural status	VST	Reply to official communication
Date of legal/procedural status	VSTT	Jul 8, 2011

View procedures Publications (No.: 8)
Criterion	Field	Content Close details
Type of procedure	VART	Publications
Legal/procedural status	VST	Citations modified after publication
Date of legal/procedural status	VSTT	Jul 21, 2011
Issue number	HN	29
Year	PJ	2011
Publication date	VT	Jul 21, 2011
Type of publication	PART	Bibliographic data
Part	HT	Part 2

View procedures Examination procedure (No.: 9)
Criterion	Field	Content Close details
Type of procedure	VART	Examination procedure
Legal/procedural status	VST	Decision to grant patent by Examining Section/Patent Division
Date of legal/procedural status	VSTT	Jul 13, 2012

View procedures Publications (No.: 10)
INID	Criterion	Field	Content Close details
	Type of procedure	VART	Publications
	Legal/procedural status	VST	Patent specification
	Date of legal/procedural status	VSTT	Nov 22, 2012
	Issue number	HN	47
	Year	PJ	2012
	Publication date	VT	Nov 22, 2012
	Type of publication	PART	Documents
	Part	HT	Part 3
10	Published DE documents	DEPN	Original document: DE102005017288B4 Searchable text: DE102005017288B4

View procedures Publications (No.: 11)
INID	Criterion	Field	Content Close details
	Type of procedure	VART	Publications
	Legal/procedural status	VST	Patent specification: Correction of defective title pages
	Date of legal/procedural status	VSTT	Jan 31, 2013
	Issue number	HN	5
	Year	PJ	2013
	Publication date	VT	Jan 31, 2013
	Type of publication	PART	Documents
	Part	HT	Part 3
10	Published DE documents	DEPN	Original document: DE102005017288B8 Searchable text: DE102005017288B8

View procedures Examination procedure (No.: 12)
Criterion	Field	Content Close details
Type of procedure	VART	Examination procedure
Legal/procedural status	VST	Grant of patent has become final
Date of legal/procedural status	VSTT	Feb 23, 2013
Issue number	HN	22
Year	PJ	2013
Publication date	VT	May 29, 2013
Type of publication	PART	Bibliographic data
Part	HT	Part 3

View procedures Licence (No.: 13)
Criterion	Field	Content Close details
Type of procedure	VART	Licence
Legal/procedural status	VST	Willingness to grant licences declared
Date of legal/procedural status	VSTT	Sep 17, 2013
Issue number	HN	46
Year	PJ	2013
Publication date	VT	Nov 14, 2013
Type of publication	PART	Bibliographic data
Part	HT	Part 3
Date of update of the procedure	REGT	Feb 9, 2023

View procedures Administrative procedure (No.: 14)
Criterion	Field	Content Close details
Type of procedure	VART	Administrative procedure
Legal/procedural status	VST	Application is deemed to be withdrawn due to non-payment of annual fee/ IP right has lapsed due to non-payment of annual fee
Date of legal/procedural status	VSTT	Nov 3, 2022
Issue number	HN	6
Year	PJ	2023
Publication date	VT	Feb 9, 2023
Type of publication	PART	Bibliographic data
Part	HT	Part 3
Date of update of the procedure	REGT	Feb 9, 2023