Register information Patent

DE file number : 698 38 292.7 (Status: not pending/lapsed, Query started: April 20, 2024)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTNot pending/lapsed
21DE file number DAKZ698 38 292.7
96EP file numberEAKZ98 93 0516.4
86WO file numberWAKZPCT/US98/13443
97EP publication numberEPN993685
87WO publication numberWPN1999000832
54Designation/titleTIVERFAHREN ZUR VERBESSERUNG DES MIKROLOADING EFFEKTS BEIM SUBSTRATÄTZEN
51IPC main classICM
(ICMV)		 H01L 21/3213 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 H01L 21/66 (2006.01)
22DE application dateDATJun 24, 1998
96EP application dateEATJun 24, 1998
86WO application dateWATJun 24, 1998
43Date of first publicationOTJan 7, 1999
Date of publication of grantPETAug 22, 2007
71/73Applicant/ownerINHLam Research Corp., Fremont, Calif., US
72InventorINABRAHAM, Susan, C., San Jose, CA 95133, US
74RepresentativeVTRPrüfer & Partner mbB Patentanwälte Rechtsanwalt, 81479 München, DE
10Published DE documentsDEPNOriginal document: DE000069838292T2
Searchable text: DE000069838292T2
Address for service Prüfer & Partner mbB Patentanwälte Rechtsanwalt, 81479 München, DE
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31
32
Foreign priorityPRC
PRNA
PRDA
US
883860
Jun 27, 1997
Patent division in charge 33
97EP language of publicationELANGEN - Englisch
87WO language of publicationWLANGEN - Englisch
84Designated EP contracting statesEDSAT, DE, FR, GB, IE, IT, NL
Published EP/WO documentsEPWOPNOriginal document: EP000000993685
Searchable text: EP000000993685
Original document: EP000000993685B1
Searchable text: EP000000993685B1
Original document: WO001999000832
Searchable text: WO001999000832
43Date of first publicationEVTJan 7, 1999
Date of the first transfer into DPMAregisterEREGTSep 28, 2012
Date of the (most recent) update in DPMAregisterREGTOct 26, 2018
(Show all update days)(Hide all update days)Sep 28, 2012; Jan 22, 2013; Oct 26, 2018
Procedural data
No. Kind of procedure Legal status Date of legal/procedural status Date of legal/procedural status sorted ascending Date of first publication Display all details
1 Procedure relating to PCT application WO first publication without search report Jan 7, 1999   Display details
2 Procedure relating to EP application EPO 1st publication Apr 19, 2000   Display details
3 Procedure relating to EP application EPO publication of search report Apr 19, 2000   Display details
4 Publications Publication of a mention regarding EP 1st publication by DPMA May 25, 2000 May 25, 2000 Display details
5 Change of classification Change of IPC main class Oct 17, 2005   Display details
6 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Aug 22, 2007   Display details
7 Publications Publication by DPMA of mention regarding EP patent grant Oct 4, 2007 Oct 4, 2007 Display details
8 Publications Translation of EP patent specification May 15, 2008 May 15, 2008 Display details
9 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision May 23, 2008 Sep 11, 2008 Display details
10 Administrative procedure Application is deemed to be withdrawn due to non-payment of annual fee/ IP right has lapsed due to non-payment of annual fee Jan 1, 2011 Apr 21, 2011 Display details