Register information Patent

DE file number : 60 2012 052 330.1 (Status: pending/in force, Query started: March 29, 2024)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ60 2012 052 330.1
96EP file numberEAKZ12 74 8571.2
86WO file numberWAKZPCT/NL2012/050540
97EP publication numberEPN2742167
87WO publication numberWPN2013022339
54Designation/titleTIVERFAHREN UND VORRICHTUNG ZUR ATOMLAGENABSCHEIDUNG AUF EIN SUBSTRAT
51IPC main classICM
(ICMV)
C23C 16/44 (2006.01)
51IPC secondary class(es)ICS
(ICSV)
C23C 16/52 (2006.01), C23C 16/54 (2006.01), C23C 16/455 (2006.01), C23C 16/458 (2006.01)
22DE application dateDATJul 30, 2012
96EP application dateEATJul 30, 2012
86WO application dateWATJul 30, 2012
43Date of first publicationOTFeb 14, 2013
Date of publication of grantPETOct 17, 2018
71/73Applicant/ownerINHNederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO, 's-Gravenhage, NL
72InventorINKNAAPEN, Raymond Jacobus Wilhelmus, NL-2628 VK Delft, NL; OLIESLAGERS, Ruud, NL-2628 VK Delft, NL; VAN DEN BERG, Dennis, NL-2628 VK Delft, NL; VAN DEN BOER, Matijs C., NL-2628 VK Delft, NL; MAAS, Diederik Jan, NL-2628 VK Delft, NL; VAN DER DONCK, Jacques Cor Johan, NL-2628 VK Delft, NL; ROOZEBOOM, Freddy, NL-2628 VK Delft, NL
Address for service V.O., 2508 DH The Hague, NL
33
31
32
Foreign priorityPRC
PRNA
PRDA
EP
11177166
Aug 10, 2011
Due dateFT
FG
Jul 31, 2024
Annual fee for the 13th year Patent fees
Patent division in charge 45
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR
Published EP/WO documentsEPWOPNOriginal document: EP000002742167
Searchable text: EP000002742167
Original document: EP000002742167B1
Searchable text: EP000002742167B1
Original document: WO002013022339
Searchable text: WO002013022339
43Date of first publicationEVTFeb 14, 2013
Date of the first transfer into DPMAregisterEREGTAug 1, 2014
Date of the (most recent) update in DPMAregisterREGTJul 28, 2023
(Show all update days)(Hide all update days)Aug 1, 2014; Jun 16, 2016; May 9, 2018; Oct 4, 2018; Oct 9, 2018; Nov 15, 2018; Jan 5, 2019; Apr 25, 2019; Jul 30, 2019; Aug 8, 2019; Sep 5, 2019; Oct 10, 2019; Jul 28, 2020; Jul 29, 2021; Aug 5, 2022; Jul 28, 2023
Procedural data
No. Kind of procedure Legal status Date of legal/procedural status Date of legal/procedural status sorted ascending Date of first publication Display all details
1 Procedure relating to PCT application WO publication Feb 14, 2013   Display details
2 Procedure relating to PCT application WO publication Feb 14, 2013   Display details
3 Procedure relating to EP application EPO 1st publication Jun 18, 2014   Display details
4 Publications Publication of a mention regarding EP 1st publication by DPMA Jul 31, 2014 Jul 31, 2014 Display details
5 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Oct 17, 2018   Display details
6 Publications Publication by DPMA of mention regarding EP patent grant Nov 15, 2018 Nov 15, 2018 Display details
7 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Jul 18, 2019 Oct 10, 2019 Display details