Master dataINID | Criterion | Field | Content |
---|
| Type of IP right | SART | Patent |
| Status | ST | Pending/in force |
21 | DE file number | DAKZ | 60 2012 052 330.1 |
96 | EP file number | EAKZ | 12 74 8571.2 |
86 | WO file number | WAKZ | PCT/NL2012/050540 |
97 | EP publication number | EPN | 2742167 |
87 | WO publication number | WPN | 2013022339 |
54 | Designation/title | TI | VERFAHREN UND VORRICHTUNG ZUR ATOMLAGENABSCHEIDUNG AUF EIN SUBSTRAT |
51 | IPC main class | ICM (ICMV) | C23C 16/44 (2006.01) |
51 | IPC secondary class(es) | ICS (ICSV) | C23C 16/52 (2006.01), C23C 16/54 (2006.01), C23C 16/455 (2006.01), C23C 16/458 (2006.01) |
22 | DE application date | DAT | Jul 30, 2012 |
96 | EP application date | EAT | Jul 30, 2012 |
86 | WO application date | WAT | Jul 30, 2012 |
43 | Date of first publication | OT | Feb 14, 2013 |
| Date of publication of grant | PET | Oct 17, 2018 |
71/73 | Applicant/owner | INH | Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO, 's-Gravenhage, NL |
72 | Inventor | IN | KNAAPEN, Raymond Jacobus Wilhelmus, NL-2628 VK Delft, NL; OLIESLAGERS, Ruud, NL-2628 VK Delft, NL; VAN DEN BERG, Dennis, NL-2628 VK Delft, NL; VAN DEN BOER, Matijs C., NL-2628 VK Delft, NL; MAAS, Diederik Jan, NL-2628 VK Delft, NL; VAN DER DONCK, Jacques Cor Johan, NL-2628 VK Delft, NL; ROOZEBOOM, Freddy, NL-2628 VK Delft, NL |
| Address for service | | V.O., 2508 DH The Hague, NL |
33 31 32
| Foreign priority | PRC PRNA PRDA
| EP 11177166 Aug 10, 2011
|
| Due date | FT FG | Jul 31, 2024 Annual fee for the 13th year
Patent fees |
| Patent division in charge | | 45 |
97 | EP language of publication | ELANG | EN - Englisch |
84 | Designated EP contracting states | EDS | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR |
| Published EP/WO documents | EPWOPN | Original document:
EP000002742167 Searchable text:
EP000002742167 Original document:
EP000002742167B1 Searchable text:
EP000002742167B1 Original document:
WO002013022339 Searchable text:
WO002013022339 |
43 | Date of first publication | EVT | Feb 14, 2013 |
| Date of the first transfer into DPMAregister | EREGT | Aug 1, 2014 |
| Date of the (most recent) update in DPMAregister | REGT | Jul 28, 2023 (Show all update days)(Hide all update days)Aug 1, 2014; Jun 16, 2016; May 9, 2018; Oct 4, 2018; Oct 9, 2018; Nov 15, 2018; Jan 5, 2019; Apr 25, 2019; Jul 30, 2019; Aug 8, 2019; Sep 5, 2019; Oct 10, 2019; Jul 28, 2020; Jul 29, 2021; Aug 5, 2022; Jul 28, 2023 |